Principal scheam of atom pinhole camera
"Atom Nanolithoraph" based on atom
pinhole camera.
Prototype of a comertial device builled in collaboration of Institute
for spectroscopy and Experimental Factory of Scientific Engineering
(1) membrane holder in the form of a disc 3 mm in
diameter and 200 μm in
thickness, with a membrane 0.5 mm× 0.5 mm in size at the
center,
(2) membrane made of 50 nm thick Si3N4; a white square marks the field
with nano-apertures. (b) SEM image of the membrane portion with
nano-apertures 120 nm in diameter, manufactured by the method of ion
beam milling.
AFM-image of a nanostructure built up from atoms
of In on a silicon surface
Plasmonic nanowaveguide
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There
are several
approaches to fabrication of nanostructures with sizes of several tens
of
nanometers; each of them has a number of advantages and drawbacks. In
particular, the difficulties in further development of approved methods
are
well known: (i) conventional photolithography has a diffraction limit,
(ii)
lithography based on charged particle beams meets problems related to
commercial production of structures and a significant role of Coulomb
repulsion, (iii) scanning probes have a low output, and (iv) self
assembling
fabrication is not an universal process. An alternative approach for
nanotechnology is atom optics, i.e., optics of material particles
(electron and
ion optics). It deals with problems of
formation and control of
ensembles and
beams of neutral atoms. The term “atom optics” is
similar to the terms “light
optics” or “photon optics”. An important
direction of atom optics is the
development of basic elements, similar to the elements of conventional
light
optics. Among many applications of atom optics elements, atom
lithography is
potentially important for micro and nanofabrication of material
structures.
Despite a large number of proposed methods for
focusing atomic beams,
this problem remains experimentally difficult. The main difficulty is
the
fabrication of the atom–field interaction potential with
properties similar to
those of the “ideal” lens for atoms. We
experimentally implemented for the
first time another approach to the problem of focusing and constructing
images
in atomic optics, which is based on the concept of a pinhole camera;
the latter
is used both in light optics and in modern experimental physics when it
is
difficult to form a focusing potential. In an atomic “pinhole
camera”, an
atomic beam is transmitted through an array of
holes in a mask, thus forming, by analogy with optics, a
“luminous object” of
specified geometry. The atoms transmitted through the holes in the
mask,
propagating in vacuum over straight-line trajectories, arrive at a thin
film
located at a distance L from the mask. Each hole
of the film serves as a
pinhole camera for atoms, forming an image of the
“object” on the surface of a
substrate, which is located at a small distances l behind
the film. In
this geometry, a set of object images, decreased approximately by a
factor of m = L/l ,
is formed on the substrate. The atomic “pinhole
camera” is an analog of the Feynman’s scalable
manufacturing system [1] that
could manufacture a smaller scale replica of itself.
References:
[1]
Feynman R P 1993 Infinitesimal machinery J.
Microelectromech. Syst. 2,
4–14
(1983
Lecture reprinted)
-
V.I. Balykin, "Ultracold atoms and atom
optics", UFN, v.54, p.844 (2011) (eng) (rus)
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V.I. Balykin, "Atom optics and its
applications", Vestnik RAN, v.81, p.291 (2011) (rus)
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P. Melentiev, A. Afanasiev, D. Lapshin, V.
Balykin, A. Zablotskiy, A. Kuzin, A. Baturin, "Creation of atomic and
molecular nanostructures of arbitrary shape on a surface", Proceedings
of the First Conference on Nanofilms (2010)
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P N Melentiev, A
V Zablotskiy, D A Lapshin, E P Sheshin, A S Baturin and V I Balykin,
"Nanolithography based on an atom pinhole camer" , Nanotechnology, Vol.
20, 235301 (2009)
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P.N. Melentiev, A.V. Zablotskiy, A.A. Kuzin,
D.A. Lapshin, A.S. Baturin, V.I. Balykin, "Nanolithography based on an
atom pinhole camera for fabrication of metamaterials", Metamatirials,
Vol. 3, p. 157 (2009)
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V. I. Balykin
and P. N. Melentiev, "Nanolithography
with Atom Optics", Nanotechnologies in Russia, Vol. 4, Nos.
7–8, pp. 425–447 (2009)
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V.I. Balykin,
"Atom Optics and Nanotechnology", Physics-Uspekhi, Vol.52, p.1 (2009)
(eng) (rus)
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V.
I. Balykin, P. A. Borisov, V. S. Letokhov, P. N. Melentiev, S. N.
Rudnev, A. P. Cherkun, A. P. Akimenko, P. Yu. Apel’, and V.
A. Skuratov, "Parallel Fabrication of Atomic Nanostructures", Bulletin
of the Russian Academy of Sciences: Physics, Vol. 72, pp.
207–211 (2008)
-
V.
I. Balykin, "Atom parallel
fabrication of nanostructures", UFN, 177, pp. 780-786 (2007) (in
Russian)
(in English)
-
V.I. Balykin,
P.N. Melentiev, A.E. Afanasiev, S.N. Rudnev, A.P. Cherkun, V.S.
Letokhov, P.Yu. Apel, V.A. Skuratov, V.V. Klimov "Atom Nano-Optics and
Nano-lithography", WSPC - Proceedings
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V.
I. Balykin, P. A. Borisov,
V. S. Letokhov, P. N. Melent’ev, S. N. Rudnev, A. P. Cherkun,
A. P. Akimenko, P. Yu. Apel’, and V. A. Skuratov, "Atom
"Pinhole Camera" with Nanometer Resolution", JETP Letters, Vol. 84, No.
8, pp. 466–469 (2006)
- V.I Balykin, V.V. Klimov,
V.S. Letokhov, "Atom Nanooptics", Handbook of Theoretical and
Computational Nanotechnology, V.7, Eds. Rieth M., Schommers W.,
Amsterdam: Elsevier (2006)
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